EFFECT OF THE N2/Ar FLOW RATIO ON THE MICROSTRUCTURE AND MECHANICAL PROPERTIES OF TiSiCN COATINGS

TiSiCN coatings were prepared with the multi-arc ion plating and magnetron sputtering technique. The effect of N2/Ar flow ratio on properties was studied using scanning electron microscopy (SEM), X-ray diffraction (XRD), photoelectron spectroscopy (XPS) a friction wear tester (UMT-3). With an increase in ratio, number large particles surface first increases then decreases. intensity TiN (200) peak gradually, while grain size decreases increases. A coating consists Ti (N, C) nanocrystallites, amorphous SiC, Si3N4 carbon. When is 5 : 1, exhibits highest hardness excellent resistance.